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Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester

B. D. Pant , Shanky Saxena , Ritu Sharma

This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of...

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